세션명 | 기능성 고분자 |
---|---|
발표장 | 제5회장 (205-206) |
논문코드 | 1L5-5 |
발표일 | 2018-10-11 |
발표시간 | 15:30-16:00 |
논문제목 | Three-dimensional Mechanical Metamaterials fabricated by Multi-beam Interference Lithography |
발표자 | 문준혁 |
발표자 소속 | 서강대학교 |
저자 | 문준혁† |
소속 | 서강대학교 |
논문초록 | Mechanical metamaterials are interesting because of their anisotropic elastic properties. This work demonstrates the design of a 3D SU8 nanopatterned structure created for use as a metamaterial by multi-beam inference lithography. Etching and lithography were used to reduce the bridge width of the macroscopic basis in the FCC structures, which simulated changing the Young’s and shear moduli. The result reveals that the modulus ratio (Young’s/shear) was increased by reducing the width. By decreasing the width of the structure from 300 nm to 40 nm, the ratio was increased by 37%. |